Code: SLA5853S2GAB2C2A1

Mass Flow Controller: Precision MFC featuring industry leading

repeatability, fast response, ultra-low drift and self-diagnostics

Revision Rev B

Base Model SLA5853 Rev B Flow Controller

Max Press 1000 psig [69 BAR]

Max Temp 149F [65C]

Body Material 316L SS

Valve Type Normally closed

Valve Seat Material Viton

Seals / O-Ring Viton o-rings

Electrical Connector 15-pin D-Conn

Connection Size 1/2-IN

Connection Type FNPT

FS Flow Rate 120 NM3H

Fluid / Gas ARGON Ar

Flow Type SV

Inlet Pressure 1 MPag

Outlet Pressure 0.5 MPag

Cal Ref Temp 0'C

Communications Smart Emulation

Input Signal 4-20mA

Output Signal 4-20mA

Electrical Conn. - Digital Smart Emulation (Analog and/or RS485) REV-B

Baud Rate 19200 baud Standard Rate

Output Enhancement Standard settling /

Power Supply 24 Vdc

Certification None (safe area use)

Mounting Attitude (1) Horizontal base down

Calibration Single standard calibration up to 200 PSIG

OEM Standard Brooks label

Orifice 0.032 orifice

Restrictor Size code F

Restrictor Type LFE

Customer Tag Requirements No Tags

Operating Temp 20 C

Sensor Factor 1.395