SLA5853S2NAB2C2A1 Mass Flow Controller: Precision MFC featuring industry leading repeatability, fast response, ultra-low drift and self diagnostics

Revision Rev B

Base Model SLA5853 Rev B Flow Controller

Max Press 1000 psig [69 BAR]

Max Temp 149F [65C]

Body Material 316L SS

Valve Type Normally closed

Valve Seat Material Viton

Seals / O-Ring Viton o-ring

Electrical Connector 15-pin D-Conn

Connection Size 1/2-IN

Connection Type BSP

FS Flow Rate 60 NM3H

Fluid / Gas Argon

Flow Type SV

Inlet Pressure 1 MPa-g

Outlet Pressure 0.5 MPa-g

Cal Ref Temp 0'C

Communications Smart Emulation

Input Signal 4-20mA

Output Signal 4-20mA

Electrical Conn. - Digital Smart Emulation (Analog and/or RS485) REV-B

Baud Rate 19200 baud Standard Rate

Output Enhancement Standard settling / response time

Power Supply 24 Vdc

Certification None (safe area use)

Mounting Attitude (1) Horizontal base down

Calibration Single standard calibration up to 200 PSIG

OEM Standard Brooks label

Orifice 0.048 orifice

Restrictor Size code E

Restrictor Type LFE

Customer Tag Requirements No Tags

Operating Temp 70 F

Min Control Press % (xx10/20) 0