Thiết bị đo lưu lượng brooks instrument SLA5800 Series MFC (Ref S/N: T88253/009) SLA5853SZ1006

Description SLA5853SZ1006 Mass Flow Controller

Model : SLA5853, ST'D ELASTOMER SERIES

Type of Meter : MASS FLOW CONTR., #3, 100-2500 LPM

Digital I/O Comm. : RS-485 (SELECT APPL. ANALALOG I/O)

Mechanical Connections : #3= 10MM TUBE COMPRESSION

O-ring Material : VITON

Valve Seat Material : VITON

Valve Type : N.C. PRESS. DIFF. >30 PSIG (2 BAR)

Analog I/O Communications : 0-5 VOLT I/O - 15-PIN D-CONN

Power Supply Inputs : 24 Vdc

Output Enhancements : STD. RESPONSE

Certification : SAFE AREA

Orifice Size : #3=0.032"

Restrictor Type : #3 (BELLOWS, RESTR., LIMITOR RING)

Restrictor Size : #0=PLUG <8CCM/ #1=15-26/ #3=201-450

Calibration Conditions : 1 "S" CALIB-INLET PRES. <13,8 BARG

OEM Code : STD BROOKS LABELLING

Major Software revision : REV. A