Thiết bị đo lưu lượng SLA5851S1DBF1C2A1 Brooks instrument
Advance and simplify your mass flow control.
Models SLA5850 / SLA5851 / SLA5853 / SLA5860 / SLA5861 / SLA5863
Imagine choosing just one mass flow controller platform to handle fourteen different pressure or flow rates going into a single process. All while delivering the exact same, ultra-precise and repeatable output on the other side. That’s the advanced simplicity you get with the SLA5800 Series digital mass flow controllers and meters.
The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry leader in mass flow measurement and control technology. Engineered with a superior design - and manufactured with advanced metrology and test systems - the SLA5800 digital MFC offers a better zero drift specification than competitive products. SLA5800 has been proven to maximize production uptime and reduce maintenance and machine downtime costs.
SLA5850 | SLA5851 | SLA5853 | SLA5860 | SLA5861 | SLA5863 | |
Product Type | Mass Flow Controller | Mass Flow Controller | Mass Flow Controller | Mass Flow Meter | Mass Flow Meter | Mass Flow Meter |
Differentiator |
Controller Flow Range |
Controller Flow Range |
Controller Flow Range |
Meter Flow Range |
Meter Flow Range |
Meter Flow Range |
Flow Range (Full Scale Capacity) | 0.003 - 50 slpm | 15 - 150 slpm | 100 - 2500 slpm | 0.003 - 50 slpm | 15 - 150 slpm | 100 - 2500 slpm |
Max Pressure |
1500 psi / 103 bar Optional 4500 psi / 310 bar |
1500 psi / 103 bar | 1000 psi / 70 bar |
1500 psi / 103 bar Optional: 4500 psi / 310 bar |
1500 psi / 103 bar | 1000 psi / 70 bar |
Accuracy |
±0.6% of SP |
±0.6% of SP |
±0.6% of SP 1100 slpm up to 2500 slpm: ±0.6% of FS |
±0.6% of SP |
±0.6% of SP |
±0.6% of SP 1100 slpm up to 2500 slpm: ±0.6% of FS |
Repeatability | 0.20% S.P. | 0.20% S.P. | 0.20% S.P. | 0.20% S.P. | 0.20% S.P. | 0.20% S.P. |
Response Time | <1 second | <1 second | <3 seconds | <1 second | <1 seconds |
<3 seconds |
Multi-Gas & Range Configurability | Standard | Standard | Standard | Standard | Standard | Standard |
Diagnostic Capability |
Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack |
Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack |
Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack |
Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack |
Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack |
Status Lights - MFC Health , Network Status Alarms - Sensor Output, control Valve output, Over Temperature, Power Surge/Sag, Network Interruption Diagnostic/Service Port - RS485 via 2.5 mm jack |
Analog Communication |
0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA |
0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA |
0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA |
0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA |
0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA |
0-5 Vdc, 1-5 Vdc, 0-10 Vdc, 0-20 mA, 4-20 mA |
Digital Communication |
DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485 |
DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485 |
DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485 |
DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485 |
DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485 |
DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® PROFINET RS-485 |